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Produits > Hexapodes > Hexapodes piezo inertiels

Hexapodes Hexapodes Alio-Attocube

 

 
 

hexaCUBE 190

 

integrated 6D motion solution

 

The hexaCUBE 190 combines six linear ECS5050/HL positioners with an innovative assembly of highest precision ball joints and linear bearings. With standard dimensions of only 190 x 180 x 105 mm³, travel ranges exceeding ± 15 mm in x,y and z direction,  rotations in excess of ± 19° around these axes are possible.

 

 
Technology hexaCUBE 190

travel mechanism

six ECS5050/HL linear piezo positioners

Size and Dimensions

footprint; height

190 mm x 180 mm; 105 mm

maximum size

220 mm x 210 mm; 125 mm

aperture

26 mm (1 inch) 

weight

1.95 kg

load

0.7 kg

Travel Range

linear x

± 15 mm

linear y

± 15 mm

linear z

± 20.0 mm

rotational Θx

+ 33 / - 19°

rotational Θy

± 21°

rotational Θz

 ± 19°

Repeatability (1 sigma)

x,y, z

50 nm

Θx, Θy, Θ

1 µrad

Physical Properties

materials

aluminum, stainless steel, plastic

stiffness

1 N/µm (x,y), 3 N/µm (z)

Working Conditions

temperature

0..100°C

vacuum

HV/UHV models on request 

Compatibility with Electronics

 

two ECC100/PRO required

 

LES GAMMES DE PRODUITS

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Nom du produit Fiche produit Documentation
HexaCUBE 190 HexaCUBE 190 HexaCUBE 190 Specifications hexaCUBE 190.pdf

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