AngularesTM – Extra large Tip/Tilt Range Hexapod 

The AngularesTM Hybrid Hexapod® from ALIO Industries offers the widest angular travel range of any 6-Degree-Of-Freedom (6-DOF) positioner on the market, with 60-degree tip/tilt travel. This new hexapod approach  features precision crossed roller bearing guides, optical incremental or absolute encoder feedback on all axes, linear motor and/or servo ball screw drives, unlimited programmable tool center point locations, and zero backlash on all axes. 

With unlimited XY travel, Z travel of 62 mm (expandable to 208 mm using other tripod models), and continuous 360 degree Theta-Z, the AngularesTM offers unmatched positioning performance. It delivers XYZ bidirectional repeatability of less than +/- 100nm, velocity up to 100 mm/second XY and Z, and less than 10 nanometers linear and 0.1 arc-seconds angular minimum incremental motion. 

The AngularesTM is ideal for various applications such as aspheric and freeform optical metrology, silicon photonics packaging and probing, laser micro processing, wafer metrology, camera module alignment and assembly, and optical element and fiber alignment. 

Download data sheets to learn more about the AngularesTM Hybrid Hexapod® from ALIO Industries.