The ANPx101 offers high resolution and high stability over a displacement distance of 5 mm. For xyz positioning, two X positioners can be mounted on top of each other and paired with a z-plate.
They are available with or without position sensor (/RES) to work in open or closed loop.
Cryogenic version (/LT): 1K… 373K
Vacuum or ultra-vacuum version (/HV or/UHV): 10-8mbar or 5-10-11mbar
Titanium is the material of choice for cryogenic nanopositioners because it is lightweight, non-magnetic and has a coefficient of expansion suitable for piezoelectric elements, which ensures reliable low-temperature performance.
Full list of nanopositioners.pdf
Data sheets to download
Data Sheet ANPx101/RES/UHV.pdf
Data sheet ANPx101/RES/LT/HV.pdf