Compact, ultra-stable differential laser interferometer:
- Differential length or angle measurement of the highest accuracy
- Differential measurement minimizes environmental influences
- Ultra-stable thermal sensor design, temperature sensitivity < 10 nm/K
- Various optical reflectors can be used, e.g. spherical reflectors or flat mirrors
- Highly invariant measurement reflector inclination
- Compact, robust design
- Stainless steel sensor head as standard
- Beam distance: 14 mm
- OEM versions, OEM software and vacuum version available.
- Can be used as a feedback system with optional interfaces
- Numerous trigger options
- The ultra-stable, compact SP 5000 DI/F differential interferometer is designed for applications where highly stable length measurements are required over long periods. The sensor’s compact design enables long-term stable adjustment and placement, even in confined spaces. The interferometer’s basic principle is based on the SP 5000 DI series, and enables sub-nanometer length resolutions. Measurements over several meters are easily possible thanks to the use of SP series reflectors.
Data sheets to download