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Compact, ultra-stable differential laser interferometer:

  • Differential length or angle measurement of the highest accuracy
  • Differential measurement minimizes environmental influences
  • Ultra-stable thermal sensor design, temperature sensitivity < 10 nm/K
  • Various optical reflectors can be used, e.g. spherical reflectors or flat mirrors
  • Highly invariant measurement reflector inclination
  • Compact, robust design
  • Stainless steel sensor head as standard
  • Beam distance: 14 mm
  • OEM versions, OEM software and vacuum version available.
  • Can be used as a feedback system with optional interfaces
  • Numerous trigger options
  • The ultra-stable, compact SP 5000 DI/F differential interferometer is designed for applications where highly stable length measurements are required over long periods. The sensor’s compact design enables long-term stable adjustment and placement, even in confined spaces. The interferometer’s basic principle is based on the SP 5000 DI series, and enables sub-nanometer length resolutions. Measurements over several meters are easily possible thanks to the use of SP series reflectors.

 

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