The ECSx3080 inertial piezo plate offers high-resolution positioning over a displacement range of 50 mm. Its high guiding precision is achieved with cross roller bearings.
Available in open or closed loop for precision control by its optoelectronic sensor, it is used with the AMC100 controller.
Full list of nanopositioners.pdf
Download data sheet
Data sheet ECSx3080/AI/RT.pdf
Data sheet ECSx3080/AI/HL/RT.pdf
Data sheet ECSx3080/AI/NUM/RT.pdf
Data sheet ECSx3080/AI/HL/NUM/RT.pdf
Data sheet ECSx3080/StSt/HV.pdf
Data sheet ECSx3080/StSt/NUM/HV.pdf
Data sheet ECSx3080/StSt/NUM+/HV.pdf
Data sheet ECSx3080/StSt/UHV.pdf