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X-BOT-50 is a miniature hexapod with a height of 60 mm for positioning and adjusting precision components around 6 degrees of freedom with sub-micrometer resolution. 

A 360° rotation around Z can be integrated on the carrier platform. HV, UHV and non-magnetic versions are also available. 

Customized displacement ranges are available on request. 

 

Key features of the X-BOT-50 compact hexapod: 

 

  • Travels: ±14mm by ±14mm by ±2.5mm XYZ and ±9° by ±10° inclination from center
  • Cross roller guides
  • Dimensions: approx. 60 x 60 x 60 mm
  • Load capacity up to 200g
  • Vacuum and non-magnetic versions available
  • Maximum 19mm diameter opening when XY is in position 0
  • Minimum 5mm diameter opening at maximum XY travel (without optional rotation stage) 

 

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Download data sheet

Hexapod X-BOT-50 Data Sheet.pdf