Microscope Vibrometer

The NA (Nano Analyser) nanometric vibration analyzer for micro-structures combines the performance of a Michelson interferometer, a microscopic lens, a USB camera and a motorized traversing stage.

The sample to be analyzed is placed on the displacement stage, which has a 50x50mm positioning range. The vibrating object can be viewed on a screen via the camera. Amplification lenses from x10 to x50 are available, reducing the size of the light spot to 2µm. The precision of the Michelson, coupled with a high-frequency sampling card, enables vibrations from a few nanometers to several millimeters to be measured, from 0 to 2MHz and with sub-nanometer resolution.

Reconstruction software combined with scanning of the positioning stage provides a dynamic topography of the measured sample (in the photo below, measurement of the end of a piezo-electric actuator).

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