NMM-1 nanometric measuring station

The NMM (“Nano Measuring Machine”) nanometric measuring and positioning station is used to measure object position in all three spatial coordinates within a volume of 25mm x 25mm x 5mm, with a resolution of 0.1 nm. Its unique sensor arrangement provides Abbe error-free measurements in all three spatial coordinates. The measurement axes of three interferometers for measuring distances along the three spatial coordinate axes intersect at a single point, which is also the point of contact between the object to be characterized and the probe to be used (AFM tip, for example).

The object is placed directly on a cube corner that can be moved. The position of the corner cube is measured by three SP500 series interferometers. The corner cube is moved by a 3-axis electrodynamic system. Any angular deviation is measured and corrected by two sensors.

The ultra-stabilized laser is guided from the control electronics to the three interferometers via fiber optics, resulting in a thermally stable Nano Measuring Machine.

Application:

• Positioning, manipulation, processing and measurement of objects in micromechanics, microelectronics, optics, molecular biology and high-precision engineering requiring nanometric resolution over a wide range of displacements.
• Scanning microscopy in a volume of 25mmX25mmX5mm
• Precision part measurement such as probes for SNOM, ASNOM, AFM
• Various reference sensors available

Nanometer station operating mode:

• Dynamic positioning system
• Measurement system operating in either linear or step-by-step mode

Technical data :

• Measurement and positioning range: 25mmX25mmX5mm
• Resolution: 0.1nm
• X and Y displacement speed: <2mm/s
• Displacement speed in Z direction: <50mm/s

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