SP 5000 DI/DS four-beam laser interferometer

Four-beam laser interferometric displacement and angle difference measurement system:

Highly stable measurements of differential length and pitch angle
Perfect for XY stages
Beam spacing 15 mm (length measurement) and 6 mm (angle measurement)
Maximum measurable distance: 5m
Extremely low temperature sensitivity < 20 nm / K
OEM and vacuum versions of the device are available.
The SP 5000 DI/DS 4-beam laser interferometer combines the advantages of a differential interferometer with those of a multi-beam interferometer. For the first time, it combines highly stable length measurement
based on the differential principle with high-resolution interferometric measurement of the angle of inclination. This makes it possible to detect not only the tiniest movements, but also the smallest inclinations on
larger surfaces, without the results being subject to the thermal and physical influences of the environment.
The interferometer is designed for use with flat mirrors and as an integrated measuring system. It can also be used with reflectors. The interferometer is adjusted using ultra-stable optical components integrated into the beam path.