OptoScan 600

OptoSurf developed the OptoScan 600 especially for measuring large semiconductor panels. Panels are not the only ones that can be measured – the device can also be used for sheets or flat parts such as polished tools or mirrors.

The OptoScan 600, which is compatible with clean rooms, can measure surfaces up to a maximum of 600 x 600 mm 2. Different measurement programs are available: linear scans in x and y orientation, partial and full scans, roughness analysis (Aq or – after creation of a correlation – Ra, Rz), shape and ripple. The system can be controlled with an additional vacuum chuck. Maximum feed speed is 600 mm/sec.

Contact us for a quote