Two slit edges are driven by a single piezoelectric actuator. Solid-state flexible hinges with a parallelogram design were used to build the piezo slot systems to ensure synchronization of the slot edges with the centerline.
To avoid the effects of hysteresis, creep and temperature, the piezoelectric slot can be fitted with a strain gauge measurement system. Positioning accuracy of the piezoelectric slot with an integrated measuring system is generally 0.1% or better. Piezo slotted elements are also available with steel slotted edges. Almost all PZS piezo slot systems are available in UHV-compatible versions and with different slot body and edge materials (INVAR).
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