Interferometers with 1 to 4 laser beams for measuring linear and angular displacements in 2 to 6 degrees of freedom.
Showing all 5 results
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SP 5000 DS dual-beam laser interferometer
Simultaneous length and angle measurement (double beam)
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SP 5000 TR 3-beam interferometer
Simultaneous measurement of length and pitch/yaw angle (triple beam)
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SP 15000 C6 NG laser interferometer
Calibration interferometer (6 DoF)
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SP 5000 DI Differential Interferometer
Ultra-stable differential interferometer
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SP 5000 DI/DS four-beam laser interferometer
Four-beam differential interferometer
