Attocube ECSx3030 linear stages

The ECSx3030 inertial piezo plate is the smallest plate in the attocube industrial range. It offers high-resolution positioning over a travel range of 20 mm. 

For xyz positioning, two ECS drives are mounted on top of each other in a perpendicular orientation and a third is added with an L-shaped support. Its high precision is achieved with cross roller bearings. 

These turntables are available in open loop and closed loop version 

They are used with the ANC100 controller 

Full list of nanopositioners.pdf