High performance two-axis NanoSXY 120 and NanoSXY 400

The newly designed platens of the nanoSXY series combine the high precision and speed of a piezo positioning system with a special actuation design for long travel movements. 

The ultra-flat design of the stage and the ease with which you can combine the stage with a xy scanning system make the system particularly useful for a wide variety of applications. 

Based on the unique nanoX design with bidirectional piezojena actuation, this series is designed to move high load masses with a resolution of 0.25 nm. The design of the nanoX also ensures excellent guiding accuracy without any parasitic movement and actively improves the stabilization time. 

The stages can be equipped with a high-resolution feedback system for closed loop control. 

Application areas include high-resolution metrology, x and xy scanning and dynamic positioning. The plates are also available in cryogenic and vacuum versions. 

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Data sheets to download