NPP-1 interferometric measurement and positioning system

• High-precision 2.5 D measuring and positioning system
• Measurement and positioning range: surface Ø 100 mm
• Lateral measurement resolution ≤ 0.02 nm
• Control: 3 fiber-coupled differential interferometers
• Metrological repeatability thanks to the use of HeNe lasers at 633 nm as the light source for the interferometers.
• Atomic force microscopes as probing measurement system, others on request
• Open device architecture enables application of customer-specific sensors
• The NPP-1 is controlled by PC software. A user API is available.
• The NPP-1 nano-measurement and positioning platform enables positioning in a range of around 100 mm. The high resolution of the laser interferometers used for control, the rigid architecture of the positioning assembly, the air-cushioned axes of the positioning system and an optimized control system enable position deviations and trajectory fidelity of movements < 2 nm RMS.
• The object to be measured is placed directly on a moving mirror. The position and rotation of the mirror are detected interferometrically.
• Ultra-stable SP-DI/F series interferometers are used in this system. Light from a stabilized laser is transmitted by optical fibers from the electronics unit to the interferometer heads. This makes the NPP-1 compact and temperature-stable.
• With a payload of up to 5 kg, the platform enables larger, heavier objects to be positioned with great precision. The principle of the NPP-1 nanopositioning system is designed to be scalable, so the system can be customized on request.

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