OptoScan

The X-Y OptoScan measuring table system is ideal for full scan measurements of flat measuring probes. Its main applications are texture analysis, wave measurement, gloss measurement and defect detection. Thanks to the combination of a high-precision positioning system and the OS 500 scatterlight sensor, shape deviations even in the nanometer range are reliably detected. The table is comfortably controlled by OptoSurf software. To visualize the detected data, the 3D software instantly merges the collected data.

The maximum size of the probes is 110 x 100 mm with the standard machine. The high-precision axes are driven by a linear actuator and offer measuring speeds of up to 500 mm/second. Due to a relatively high degree of insensitivity to variations in the measuring distance, even small mechanical imprecisions do not affect the accuracy of the system. Shape deviations < 0.1 μm are detectable over measuring lengths of 100 mm. The measurement range for roughness and ripple is 1 nm.

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