SP 5000 TR 3-beam interferometer

• Flexible length measurement system of the highest precision
• Easy handling and adjustment thanks to integrated beam direction detection
• Various optical reflectors can be used, e.g. spherical reflector or plane mirror
• Maximum measurable distance: 5m
• Permissible inclination of measuring reflector up to ± 12.5°.
• Compact design
• Sensor head design available in aluminum, stainless steel or invar
• Beam distance: 12mm
• OEM versions, OEM software and vacuum version available
• Beam deflection with optional adjustable deflecting mirror
• Wide range of applications thanks to optional interfaces
• Numerous trigger options
• Standards-compliant calibration software
• Many fields of application in industry and research require highly accurate simultaneous displacement and angle measurements. Simultaneous acquisition of pitch and yaw angles, as well as length measurement, while the carriage on which the triple-reflector unit is mounted is moving, enables axes of movement to be evaluated quickly and with great accuracy. Fast, simple sensor adjustment is particularly important.SP 5000 TR triple-beam laser interferometers are precision length-measuring instruments that combine three interferometers in a single device. The three measuring channels are powered by a light source with the same, highly stable laser frequency. As a result, three length values can be measured simultaneously with nanometer precision. The difference between two length values and the calibrated deviation of the beams enables the corresponding angle to be determined with high resolution and accuracy.

• The interferometry system is modular in design and can therefore be adapted to a wide variety of measurement tasks.
• Fiber-optic coupling of the sensor head and optional integrated beam direction detection allow easy handling and precise adjustment.
• The SP 5000 TR three-beam interferometer is compact and robust. This makes it ideal for high-precision measurements in industry and research. OEM versions for vacuum applications are available on request.
• For large measurement ranges or calibration of large objects, we recommend the use of wireless radio temperature sensors or the LCS.

Contact us for a quote

Download Data sheet