XY travel plates with central opening

ALIO’s monolithic, center-opening XY stages feature large apertures for use in all types of applications requiring accessibility to the conveyed product from all sides. 

Thanks to powerful direct linear drives and carefully engineered, high-precision cross-roller bearings in a 3-plate system, these stages are able to achieve exceptional precision. In addition to bi-directional repeatability of just +/- 50nm, the stages offer superior straightness and flatness, as well as optimized orthogonality, resulting in nanometric accuracy in displacement ranges from 30mm to 400mm. 

Scanning applications requiring smooth, continuous motion, as well as fast forward and reverse processes, can be realized just as well, helping customers to achieve ideal motion and increased throughput. 

If required by the application, the stages can also be built for high-vacuum or cleanroom applications. 

Monolithic center-opening XY stages are divided between the standard LM series and the more compact CM series. While the LM versions offer higher torque, acceleration and speed, the more compact CM series allows implementation in tools and applications with greater space constraints without compromising precision. 

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