Air-bearing rotation stages

The range of air-bearing rotation stages developed by our partner ALIO is chosen when the highest precision of rotation is required. Air bearings enable the stage to move without mechanical contact, so movement is frictionless and wear-free. Errors such as wobble, eccentricity or runout can be minimized to approximate a near-perfect, smooth 360-degree motion, even at high speeds or when the stage is mounted vertically. Thanks to powerful torque motors, constant continuous rotation and step-by-step adjustment processes can be performed with the utmost precision and reliability. 

This makes ALIO’s air-bearing rotary stages ideal for the most precise applications in the semiconductor, metrology and photonics industries. 

Please contact us for more information !