These elements were originally developed for quality control in the optical industry, and consist of a piezoelectric actuator combined with a micrometer.
The user can first set the position of the actuator, then adjust this position using piezostage. Resolution is between nm and sub-nm.
Due to the very robust construction of the element, high load masses can be lifted.
| Name | Stroke | Compatibility |
| Mici 80 | 80µm | series152 de “Mitutoyo” |
| Mici 140 | 140µm | series G de “Qioptiq Photonics” |
| Mici 180 | 180µm | series M13 de “Newport” |
| Mici 200 | 250µm | series 152 from “Mitutoyo” |
Related products
-
Piezo clamp
The piezoelectric gripper series has been designed for microsystem handling applications. The fast, precise movement of a piezo actuator is transformed by the lever transmission of […]
-
Shutter and piezo slot
Two slit edges are driven by a single piezoelectric actuator. Solid-state flexible hinges with a parallelogram design were used to build the piezo slot systems to […]
-
Piezo fiber positioner
The FAPOS series fiber positioning system has been specially developed for precise positioning of optical components, e.g. fiber alignment. Its compact size and modular design enable […]
